JPS52141684U - - Google Patents

Info

Publication number
JPS52141684U
JPS52141684U JP5064876U JP5064876U JPS52141684U JP S52141684 U JPS52141684 U JP S52141684U JP 5064876 U JP5064876 U JP 5064876U JP 5064876 U JP5064876 U JP 5064876U JP S52141684 U JPS52141684 U JP S52141684U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5064876U
Other languages
Japanese (ja)
Other versions
JPS5837452Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976050648U priority Critical patent/JPS5837452Y2/ja
Publication of JPS52141684U publication Critical patent/JPS52141684U/ja
Application granted granted Critical
Publication of JPS5837452Y2 publication Critical patent/JPS5837452Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
JP1976050648U 1976-04-21 1976-04-21 巻取式フイルタ装置 Expired JPS5837452Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976050648U JPS5837452Y2 (ja) 1976-04-21 1976-04-21 巻取式フイルタ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976050648U JPS5837452Y2 (ja) 1976-04-21 1976-04-21 巻取式フイルタ装置

Publications (2)

Publication Number Publication Date
JPS52141684U true JPS52141684U (enrdf_load_stackoverflow) 1977-10-27
JPS5837452Y2 JPS5837452Y2 (ja) 1983-08-24

Family

ID=28509787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976050648U Expired JPS5837452Y2 (ja) 1976-04-21 1976-04-21 巻取式フイルタ装置

Country Status (1)

Country Link
JP (1) JPS5837452Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015067851A (ja) * 2013-09-27 2015-04-13 東レエンジニアリング株式会社 薄膜形成装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49150780U (enrdf_load_stackoverflow) * 1973-04-25 1974-12-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49150780U (enrdf_load_stackoverflow) * 1973-04-25 1974-12-27

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015067851A (ja) * 2013-09-27 2015-04-13 東レエンジニアリング株式会社 薄膜形成装置

Also Published As

Publication number Publication date
JPS5837452Y2 (ja) 1983-08-24

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