JPS5214150B2 - - Google Patents
Info
- Publication number
- JPS5214150B2 JPS5214150B2 JP322373A JP322373A JPS5214150B2 JP S5214150 B2 JPS5214150 B2 JP S5214150B2 JP 322373 A JP322373 A JP 322373A JP 322373 A JP322373 A JP 322373A JP S5214150 B2 JPS5214150 B2 JP S5214150B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Semiconductor Integrated Circuits (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP322373A JPS5214150B2 (fi) | 1972-12-29 | 1972-12-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP322373A JPS5214150B2 (fi) | 1972-12-29 | 1972-12-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4991585A JPS4991585A (fi) | 1974-09-02 |
| JPS5214150B2 true JPS5214150B2 (fi) | 1977-04-19 |
Family
ID=11551431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP322373A Expired JPS5214150B2 (fi) | 1972-12-29 | 1972-12-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5214150B2 (fi) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3925867B2 (ja) * | 2003-12-17 | 2007-06-06 | 関西ティー・エル・オー株式会社 | 多孔質層付きシリコン基板を製造する方法 |
-
1972
- 1972-12-29 JP JP322373A patent/JPS5214150B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4991585A (fi) | 1974-09-02 |