JPS521413B2 - - Google Patents

Info

Publication number
JPS521413B2
JPS521413B2 JP47083390A JP8339072A JPS521413B2 JP S521413 B2 JPS521413 B2 JP S521413B2 JP 47083390 A JP47083390 A JP 47083390A JP 8339072 A JP8339072 A JP 8339072A JP S521413 B2 JPS521413 B2 JP S521413B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47083390A
Other languages
Japanese (ja)
Other versions
JPS4939651A (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47083390A priority Critical patent/JPS521413B2/ja
Publication of JPS4939651A publication Critical patent/JPS4939651A/ja
Publication of JPS521413B2 publication Critical patent/JPS521413B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP47083390A 1972-08-21 1972-08-21 Expired JPS521413B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47083390A JPS521413B2 (fr) 1972-08-21 1972-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47083390A JPS521413B2 (fr) 1972-08-21 1972-08-21

Publications (2)

Publication Number Publication Date
JPS4939651A JPS4939651A (fr) 1974-04-13
JPS521413B2 true JPS521413B2 (fr) 1977-01-14

Family

ID=13801083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47083390A Expired JPS521413B2 (fr) 1972-08-21 1972-08-21

Country Status (1)

Country Link
JP (1) JPS521413B2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0337568U (fr) * 1989-08-17 1991-04-11

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5655104B2 (ja) 2013-02-26 2015-01-14 大陽日酸株式会社 空気分離方法及び空気分離装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0337568U (fr) * 1989-08-17 1991-04-11

Also Published As

Publication number Publication date
JPS4939651A (fr) 1974-04-13

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