JPS521413B2 - - Google Patents

Info

Publication number
JPS521413B2
JPS521413B2 JP47083390A JP8339072A JPS521413B2 JP S521413 B2 JPS521413 B2 JP S521413B2 JP 47083390 A JP47083390 A JP 47083390A JP 8339072 A JP8339072 A JP 8339072A JP S521413 B2 JPS521413 B2 JP S521413B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47083390A
Other languages
Japanese (ja)
Other versions
JPS4939651A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47083390A priority Critical patent/JPS521413B2/ja
Publication of JPS4939651A publication Critical patent/JPS4939651A/ja
Publication of JPS521413B2 publication Critical patent/JPS521413B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP47083390A 1972-08-21 1972-08-21 Expired JPS521413B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47083390A JPS521413B2 (enrdf_load_stackoverflow) 1972-08-21 1972-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47083390A JPS521413B2 (enrdf_load_stackoverflow) 1972-08-21 1972-08-21

Publications (2)

Publication Number Publication Date
JPS4939651A JPS4939651A (enrdf_load_stackoverflow) 1974-04-13
JPS521413B2 true JPS521413B2 (enrdf_load_stackoverflow) 1977-01-14

Family

ID=13801083

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47083390A Expired JPS521413B2 (enrdf_load_stackoverflow) 1972-08-21 1972-08-21

Country Status (1)

Country Link
JP (1) JPS521413B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0337568U (enrdf_load_stackoverflow) * 1989-08-17 1991-04-11

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5655104B2 (ja) 2013-02-26 2015-01-14 大陽日酸株式会社 空気分離方法及び空気分離装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0337568U (enrdf_load_stackoverflow) * 1989-08-17 1991-04-11

Also Published As

Publication number Publication date
JPS4939651A (enrdf_load_stackoverflow) 1974-04-13

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