JPS52140992A - Grinding fluid - Google Patents

Grinding fluid

Info

Publication number
JPS52140992A
JPS52140992A JP5803976A JP5803976A JPS52140992A JP S52140992 A JPS52140992 A JP S52140992A JP 5803976 A JP5803976 A JP 5803976A JP 5803976 A JP5803976 A JP 5803976A JP S52140992 A JPS52140992 A JP S52140992A
Authority
JP
Japan
Prior art keywords
grinding fluid
grinding
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5803976A
Other languages
Japanese (ja)
Inventor
Hideo Shibata
Kameo Hirai
Yuuzou Takagi
Kiyoshi Sakurai
Hiromori Kameyama
Katsumori Takeuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DAIDO KAGAKU KOGYO
Original Assignee
DAIDO KAGAKU KOGYO
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DAIDO KAGAKU KOGYO filed Critical DAIDO KAGAKU KOGYO
Priority to JP5803976A priority Critical patent/JPS52140992A/en
Publication of JPS52140992A publication Critical patent/JPS52140992A/en
Pending legal-status Critical Current

Links

JP5803976A 1976-05-19 1976-05-19 Grinding fluid Pending JPS52140992A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5803976A JPS52140992A (en) 1976-05-19 1976-05-19 Grinding fluid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5803976A JPS52140992A (en) 1976-05-19 1976-05-19 Grinding fluid

Publications (1)

Publication Number Publication Date
JPS52140992A true JPS52140992A (en) 1977-11-24

Family

ID=13072782

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5803976A Pending JPS52140992A (en) 1976-05-19 1976-05-19 Grinding fluid

Country Status (1)

Country Link
JP (1) JPS52140992A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111073517A (en) * 2018-10-20 2020-04-28 罗门哈斯电子材料Cmp控股股份有限公司 Chemical mechanical polishing composition and method for tungsten

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111073517A (en) * 2018-10-20 2020-04-28 罗门哈斯电子材料Cmp控股股份有限公司 Chemical mechanical polishing composition and method for tungsten

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