JPS52140772U - - Google Patents
Info
- Publication number
- JPS52140772U JPS52140772U JP4915276U JP4915276U JPS52140772U JP S52140772 U JPS52140772 U JP S52140772U JP 4915276 U JP4915276 U JP 4915276U JP 4915276 U JP4915276 U JP 4915276U JP S52140772 U JPS52140772 U JP S52140772U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976049152U JPS5915072Y2 (ja) | 1976-04-19 | 1976-04-19 | プラズマエツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976049152U JPS5915072Y2 (ja) | 1976-04-19 | 1976-04-19 | プラズマエツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52140772U true JPS52140772U (de) | 1977-10-25 |
| JPS5915072Y2 JPS5915072Y2 (ja) | 1984-05-04 |
Family
ID=28508343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976049152U Expired JPS5915072Y2 (ja) | 1976-04-19 | 1976-04-19 | プラズマエツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5915072Y2 (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4944517U (de) * | 1972-07-21 | 1974-04-19 | ||
| JPS5011672A (de) * | 1973-06-01 | 1975-02-06 |
-
1976
- 1976-04-19 JP JP1976049152U patent/JPS5915072Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4944517U (de) * | 1972-07-21 | 1974-04-19 | ||
| JPS5011672A (de) * | 1973-06-01 | 1975-02-06 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5915072Y2 (ja) | 1984-05-04 |