JPS5214044B2 - - Google Patents
Info
- Publication number
- JPS5214044B2 JPS5214044B2 JP47082177A JP8217772A JPS5214044B2 JP S5214044 B2 JPS5214044 B2 JP S5214044B2 JP 47082177 A JP47082177 A JP 47082177A JP 8217772 A JP8217772 A JP 8217772A JP S5214044 B2 JPS5214044 B2 JP S5214044B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47082177A JPS5214044B2 (en) | 1972-08-18 | 1972-08-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47082177A JPS5214044B2 (en) | 1972-08-18 | 1972-08-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4940011A JPS4940011A (en) | 1974-04-15 |
| JPS5214044B2 true JPS5214044B2 (en) | 1977-04-19 |
Family
ID=13767138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47082177A Expired JPS5214044B2 (en) | 1972-08-18 | 1972-08-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5214044B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2588605B2 (en) * | 1989-03-16 | 1997-03-05 | 株式会社リコー | Movable power supply cable |
| US7479205B2 (en) | 2000-09-22 | 2009-01-20 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
| US6951221B2 (en) | 2000-09-22 | 2005-10-04 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus |
-
1972
- 1972-08-18 JP JP47082177A patent/JPS5214044B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4940011A (en) | 1974-04-15 |