JPS52140064U - - Google Patents
Info
- Publication number
- JPS52140064U JPS52140064U JP4665376U JP4665376U JPS52140064U JP S52140064 U JPS52140064 U JP S52140064U JP 4665376 U JP4665376 U JP 4665376U JP 4665376 U JP4665376 U JP 4665376U JP S52140064 U JPS52140064 U JP S52140064U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4665376U JPS52140064U (xx) | 1976-04-16 | 1976-04-16 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4665376U JPS52140064U (xx) | 1976-04-16 | 1976-04-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52140064U true JPS52140064U (xx) | 1977-10-24 |
Family
ID=28505751
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4665376U Pending JPS52140064U (xx) | 1976-04-16 | 1976-04-16 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52140064U (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016225355A (ja) * | 2015-05-27 | 2016-12-28 | 京セラ株式会社 | 試料保持具およびこれを用いたプラズマエッチング装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50127172A (xx) * | 1974-03-27 | 1975-10-06 | ||
JPS50129960A (xx) * | 1974-03-20 | 1975-10-14 |
-
1976
- 1976-04-16 JP JP4665376U patent/JPS52140064U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50129960A (xx) * | 1974-03-20 | 1975-10-14 | ||
JPS50127172A (xx) * | 1974-03-27 | 1975-10-06 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016225355A (ja) * | 2015-05-27 | 2016-12-28 | 京セラ株式会社 | 試料保持具およびこれを用いたプラズマエッチング装置 |