JPS52139768U - - Google Patents
Info
- Publication number
- JPS52139768U JPS52139768U JP4766776U JP4766776U JPS52139768U JP S52139768 U JPS52139768 U JP S52139768U JP 4766776 U JP4766776 U JP 4766776U JP 4766776 U JP4766776 U JP 4766776U JP S52139768 U JPS52139768 U JP S52139768U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4766776U JPS52139768U (show.php) | 1976-04-16 | 1976-04-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4766776U JPS52139768U (show.php) | 1976-04-16 | 1976-04-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52139768U true JPS52139768U (show.php) | 1977-10-22 |
Family
ID=28506887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4766776U Pending JPS52139768U (show.php) | 1976-04-16 | 1976-04-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52139768U (show.php) |
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1976
- 1976-04-16 JP JP4766776U patent/JPS52139768U/ja active Pending