JPS52137776U - - Google Patents
Info
- Publication number
- JPS52137776U JPS52137776U JP4555676U JP4555676U JPS52137776U JP S52137776 U JPS52137776 U JP S52137776U JP 4555676 U JP4555676 U JP 4555676U JP 4555676 U JP4555676 U JP 4555676U JP S52137776 U JPS52137776 U JP S52137776U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4555676U JPS5552675Y2 (cs) | 1976-04-14 | 1976-04-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4555676U JPS5552675Y2 (cs) | 1976-04-14 | 1976-04-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52137776U true JPS52137776U (cs) | 1977-10-19 |
| JPS5552675Y2 JPS5552675Y2 (cs) | 1980-12-06 |
Family
ID=28504637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4555676U Expired JPS5552675Y2 (cs) | 1976-04-14 | 1976-04-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5552675Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554531U (cs) * | 1978-06-24 | 1980-01-12 |
-
1976
- 1976-04-14 JP JP4555676U patent/JPS5552675Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS554531U (cs) * | 1978-06-24 | 1980-01-12 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5552675Y2 (cs) | 1980-12-06 |