JPS52137773A - Method of removing dust of dust collecting flat electrode - Google Patents
Method of removing dust of dust collecting flat electrodeInfo
- Publication number
- JPS52137773A JPS52137773A JP5509176A JP5509176A JPS52137773A JP S52137773 A JPS52137773 A JP S52137773A JP 5509176 A JP5509176 A JP 5509176A JP 5509176 A JP5509176 A JP 5509176A JP S52137773 A JPS52137773 A JP S52137773A
- Authority
- JP
- Japan
- Prior art keywords
- water
- flat electrode
- dust
- plates
- collecting flat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000428 dust Substances 0.000 title abstract 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 4
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Landscapes
- Electrostatic Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5509176A JPS52137773A (en) | 1976-05-14 | 1976-05-14 | Method of removing dust of dust collecting flat electrode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5509176A JPS52137773A (en) | 1976-05-14 | 1976-05-14 | Method of removing dust of dust collecting flat electrode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52137773A true JPS52137773A (en) | 1977-11-17 |
| JPS5430785B2 JPS5430785B2 (ref) | 1979-10-03 |
Family
ID=12989049
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5509176A Granted JPS52137773A (en) | 1976-05-14 | 1976-05-14 | Method of removing dust of dust collecting flat electrode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52137773A (ref) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5310179A (en) * | 1976-07-14 | 1978-01-30 | Nippon Earo Piyuuru Kk | Wet wall forming method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106847929B (zh) | 2011-09-29 | 2020-06-23 | 株式会社半导体能源研究所 | 半导体装置 |
-
1976
- 1976-05-14 JP JP5509176A patent/JPS52137773A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5310179A (en) * | 1976-07-14 | 1978-01-30 | Nippon Earo Piyuuru Kk | Wet wall forming method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5430785B2 (ref) | 1979-10-03 |
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