JPS52135447U - - Google Patents

Info

Publication number
JPS52135447U
JPS52135447U JP4419976U JP4419976U JPS52135447U JP S52135447 U JPS52135447 U JP S52135447U JP 4419976 U JP4419976 U JP 4419976U JP 4419976 U JP4419976 U JP 4419976U JP S52135447 U JPS52135447 U JP S52135447U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4419976U
Other versions
JPS5614365Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976044199U priority Critical patent/JPS5614365Y2/ja
Publication of JPS52135447U publication Critical patent/JPS52135447U/ja
Application granted granted Critical
Publication of JPS5614365Y2 publication Critical patent/JPS5614365Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1976044199U 1976-04-09 1976-04-09 Expired JPS5614365Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976044199U JPS5614365Y2 (ja) 1976-04-09 1976-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976044199U JPS5614365Y2 (ja) 1976-04-09 1976-04-09

Publications (2)

Publication Number Publication Date
JPS52135447U true JPS52135447U (ja) 1977-10-14
JPS5614365Y2 JPS5614365Y2 (ja) 1981-04-03

Family

ID=28503263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976044199U Expired JPS5614365Y2 (ja) 1976-04-09 1976-04-09

Country Status (1)

Country Link
JP (1) JPS5614365Y2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843941A (ja) * 1971-10-07 1973-06-25
JPS4946584A (ja) * 1972-09-13 1974-05-04
JPS4991080A (ja) * 1972-12-29 1974-08-30

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4843941A (ja) * 1971-10-07 1973-06-25
JPS4946584A (ja) * 1972-09-13 1974-05-04
JPS4991080A (ja) * 1972-12-29 1974-08-30

Also Published As

Publication number Publication date
JPS5614365Y2 (ja) 1981-04-03

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