JPS52135416U - - Google Patents

Info

Publication number
JPS52135416U
JPS52135416U JP4316676U JP4316676U JPS52135416U JP S52135416 U JPS52135416 U JP S52135416U JP 4316676 U JP4316676 U JP 4316676U JP 4316676 U JP4316676 U JP 4316676U JP S52135416 U JPS52135416 U JP S52135416U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4316676U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4316676U priority Critical patent/JPS52135416U/ja
Priority to US05/725,487 priority patent/US4080281A/en
Publication of JPS52135416U publication Critical patent/JPS52135416U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4316676U 1976-04-09 1976-04-09 Pending JPS52135416U (OSRAM)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP4316676U JPS52135416U (OSRAM) 1976-04-09 1976-04-09
US05/725,487 US4080281A (en) 1976-04-09 1976-09-22 Apparatus for making metal films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4316676U JPS52135416U (OSRAM) 1976-04-09 1976-04-09

Publications (1)

Publication Number Publication Date
JPS52135416U true JPS52135416U (OSRAM) 1977-10-14

Family

ID=28502231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4316676U Pending JPS52135416U (OSRAM) 1976-04-09 1976-04-09

Country Status (1)

Country Link
JP (1) JPS52135416U (OSRAM)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515279A (en) * 1974-05-28 1976-01-16 Corning Glass Works Fukusunoenchukeibutsutaioitsuseinihifukusuruhohooyobi kaitensupatsutasochi
JPS5154844A (en) * 1974-05-08 1976-05-14 Hokuriku Elect Ind Kinzokuhakumakuno seizosochi

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5154844A (en) * 1974-05-08 1976-05-14 Hokuriku Elect Ind Kinzokuhakumakuno seizosochi
JPS515279A (en) * 1974-05-28 1976-01-16 Corning Glass Works Fukusunoenchukeibutsutaioitsuseinihifukusuruhohooyobi kaitensupatsutasochi

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