JPS5213511B2 - - Google Patents
Info
- Publication number
- JPS5213511B2 JPS5213511B2 JP10364472A JP10364472A JPS5213511B2 JP S5213511 B2 JPS5213511 B2 JP S5213511B2 JP 10364472 A JP10364472 A JP 10364472A JP 10364472 A JP10364472 A JP 10364472A JP S5213511 B2 JPS5213511 B2 JP S5213511B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10364472A JPS5213511B2 (enExample) | 1972-10-18 | 1972-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10364472A JPS5213511B2 (enExample) | 1972-10-18 | 1972-10-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4962382A JPS4962382A (enExample) | 1974-06-17 |
| JPS5213511B2 true JPS5213511B2 (enExample) | 1977-04-14 |
Family
ID=14359466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10364472A Expired JPS5213511B2 (enExample) | 1972-10-18 | 1972-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5213511B2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121010U (enExample) * | 1979-02-21 | 1980-08-27 | ||
| JPS56107331U (enExample) * | 1980-01-21 | 1981-08-20 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5185292A (en) * | 1975-03-15 | 1976-07-26 | Matsushita Electric Works Ltd | Matsusaajikino okurisochi |
| JPS5339983A (en) * | 1976-09-25 | 1978-04-12 | Oki Electric Ind Co Ltd | Manufacture of thin film |
-
1972
- 1972-10-18 JP JP10364472A patent/JPS5213511B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55121010U (enExample) * | 1979-02-21 | 1980-08-27 | ||
| JPS56107331U (enExample) * | 1980-01-21 | 1981-08-20 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4962382A (enExample) | 1974-06-17 |