JPS52135063U - - Google Patents

Info

Publication number
JPS52135063U
JPS52135063U JP4388576U JP4388576U JPS52135063U JP S52135063 U JPS52135063 U JP S52135063U JP 4388576 U JP4388576 U JP 4388576U JP 4388576 U JP4388576 U JP 4388576U JP S52135063 U JPS52135063 U JP S52135063U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4388576U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4388576U priority Critical patent/JPS52135063U/ja
Publication of JPS52135063U publication Critical patent/JPS52135063U/ja
Pending legal-status Critical Current

Links

JP4388576U 1976-04-09 1976-04-09 Pending JPS52135063U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4388576U JPS52135063U (fr) 1976-04-09 1976-04-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4388576U JPS52135063U (fr) 1976-04-09 1976-04-09

Publications (1)

Publication Number Publication Date
JPS52135063U true JPS52135063U (fr) 1977-10-14

Family

ID=28502940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4388576U Pending JPS52135063U (fr) 1976-04-09 1976-04-09

Country Status (1)

Country Link
JP (1) JPS52135063U (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980002622A1 (fr) * 1979-05-11 1980-11-27 Fujitsu Ltd Bateau de transport de substrat a semi-conducteur
JPS5642333A (en) * 1979-09-14 1981-04-20 Toshiba Ceramics Co Ltd Mother boat for semiconductor diffusing furnace

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037354A (fr) * 1973-08-06 1975-04-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037354A (fr) * 1973-08-06 1975-04-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1980002622A1 (fr) * 1979-05-11 1980-11-27 Fujitsu Ltd Bateau de transport de substrat a semi-conducteur
JPS5642333A (en) * 1979-09-14 1981-04-20 Toshiba Ceramics Co Ltd Mother boat for semiconductor diffusing furnace

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