JPS5213388A - Ion analyzer - Google Patents

Ion analyzer

Info

Publication number
JPS5213388A
JPS5213388A JP50089231A JP8923175A JPS5213388A JP S5213388 A JPS5213388 A JP S5213388A JP 50089231 A JP50089231 A JP 50089231A JP 8923175 A JP8923175 A JP 8923175A JP S5213388 A JPS5213388 A JP S5213388A
Authority
JP
Japan
Prior art keywords
ion analyzer
electron rays
impinging
straightforward
superimposing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50089231A
Other languages
Japanese (ja)
Inventor
Atsushi Shibata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50089231A priority Critical patent/JPS5213388A/en
Publication of JPS5213388A publication Critical patent/JPS5213388A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To increase the impinging cross section of electron rays by rotating the electron rays with the object ion kept in advancing straightforward by superimposing the electric field on the magnetic field in perpendicularly crossing therewith.
JP50089231A 1975-07-23 1975-07-23 Ion analyzer Pending JPS5213388A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50089231A JPS5213388A (en) 1975-07-23 1975-07-23 Ion analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50089231A JPS5213388A (en) 1975-07-23 1975-07-23 Ion analyzer

Publications (1)

Publication Number Publication Date
JPS5213388A true JPS5213388A (en) 1977-02-01

Family

ID=13964963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50089231A Pending JPS5213388A (en) 1975-07-23 1975-07-23 Ion analyzer

Country Status (1)

Country Link
JP (1) JPS5213388A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4610155A (en) * 1982-10-14 1986-09-09 Pfd Limited Manufacture of article having undercut internal surface

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4610155A (en) * 1982-10-14 1986-09-09 Pfd Limited Manufacture of article having undercut internal surface

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