JPS52131960U - - Google Patents
Info
- Publication number
- JPS52131960U JPS52131960U JP4021476U JP4021476U JPS52131960U JP S52131960 U JPS52131960 U JP S52131960U JP 4021476 U JP4021476 U JP 4021476U JP 4021476 U JP4021476 U JP 4021476U JP S52131960 U JPS52131960 U JP S52131960U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4021476U JPS5533644Y2 (de) | 1976-03-31 | 1976-03-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4021476U JPS5533644Y2 (de) | 1976-03-31 | 1976-03-31 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52131960U true JPS52131960U (de) | 1977-10-06 |
JPS5533644Y2 JPS5533644Y2 (de) | 1980-08-09 |
Family
ID=28499368
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4021476U Expired JPS5533644Y2 (de) | 1976-03-31 | 1976-03-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5533644Y2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54158872A (en) * | 1978-06-06 | 1979-12-15 | Jeol Ltd | Sampler of electron-beam exposure unit or the like |
JPS57121134U (de) * | 1981-01-23 | 1982-07-28 |
-
1976
- 1976-03-31 JP JP4021476U patent/JPS5533644Y2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54158872A (en) * | 1978-06-06 | 1979-12-15 | Jeol Ltd | Sampler of electron-beam exposure unit or the like |
JPS57121134U (de) * | 1981-01-23 | 1982-07-28 |
Also Published As
Publication number | Publication date |
---|---|
JPS5533644Y2 (de) | 1980-08-09 |