JPS52131960U - - Google Patents

Info

Publication number
JPS52131960U
JPS52131960U JP4021476U JP4021476U JPS52131960U JP S52131960 U JPS52131960 U JP S52131960U JP 4021476 U JP4021476 U JP 4021476U JP 4021476 U JP4021476 U JP 4021476U JP S52131960 U JPS52131960 U JP S52131960U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4021476U
Other languages
Japanese (ja)
Other versions
JPS5533644Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4021476U priority Critical patent/JPS5533644Y2/ja
Publication of JPS52131960U publication Critical patent/JPS52131960U/ja
Application granted granted Critical
Publication of JPS5533644Y2 publication Critical patent/JPS5533644Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Weting (AREA)
JP4021476U 1976-03-31 1976-03-31 Expired JPS5533644Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4021476U JPS5533644Y2 (de) 1976-03-31 1976-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4021476U JPS5533644Y2 (de) 1976-03-31 1976-03-31

Publications (2)

Publication Number Publication Date
JPS52131960U true JPS52131960U (de) 1977-10-06
JPS5533644Y2 JPS5533644Y2 (de) 1980-08-09

Family

ID=28499368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4021476U Expired JPS5533644Y2 (de) 1976-03-31 1976-03-31

Country Status (1)

Country Link
JP (1) JPS5533644Y2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158872A (en) * 1978-06-06 1979-12-15 Jeol Ltd Sampler of electron-beam exposure unit or the like
JPS57121134U (de) * 1981-01-23 1982-07-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158872A (en) * 1978-06-06 1979-12-15 Jeol Ltd Sampler of electron-beam exposure unit or the like
JPS57121134U (de) * 1981-01-23 1982-07-28

Also Published As

Publication number Publication date
JPS5533644Y2 (de) 1980-08-09

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