JPS52131960U - - Google Patents

Info

Publication number
JPS52131960U
JPS52131960U JP1976040214U JP4021476U JPS52131960U JP S52131960 U JPS52131960 U JP S52131960U JP 1976040214 U JP1976040214 U JP 1976040214U JP 4021476 U JP4021476 U JP 4021476U JP S52131960 U JPS52131960 U JP S52131960U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1976040214U
Other languages
Japanese (ja)
Other versions
JPS5533644Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976040214U priority Critical patent/JPS5533644Y2/ja
Publication of JPS52131960U publication Critical patent/JPS52131960U/ja
Application granted granted Critical
Publication of JPS5533644Y2 publication Critical patent/JPS5533644Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Electron Beam Exposure (AREA)
JP1976040214U 1976-03-31 1976-03-31 Expired JPS5533644Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976040214U JPS5533644Y2 (cg-RX-API-DMAC10.html) 1976-03-31 1976-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976040214U JPS5533644Y2 (cg-RX-API-DMAC10.html) 1976-03-31 1976-03-31

Publications (2)

Publication Number Publication Date
JPS52131960U true JPS52131960U (cg-RX-API-DMAC10.html) 1977-10-06
JPS5533644Y2 JPS5533644Y2 (cg-RX-API-DMAC10.html) 1980-08-09

Family

ID=28499368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976040214U Expired JPS5533644Y2 (cg-RX-API-DMAC10.html) 1976-03-31 1976-03-31

Country Status (1)

Country Link
JP (1) JPS5533644Y2 (cg-RX-API-DMAC10.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158872A (en) * 1978-06-06 1979-12-15 Jeol Ltd Sampler of electron-beam exposure unit or the like
JPS57121134U (cg-RX-API-DMAC10.html) * 1981-01-23 1982-07-28

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158872A (en) * 1978-06-06 1979-12-15 Jeol Ltd Sampler of electron-beam exposure unit or the like
JPS57121134U (cg-RX-API-DMAC10.html) * 1981-01-23 1982-07-28

Also Published As

Publication number Publication date
JPS5533644Y2 (cg-RX-API-DMAC10.html) 1980-08-09

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