JPS5213195B2 - - Google Patents
Info
- Publication number
- JPS5213195B2 JPS5213195B2 JP5584472A JP5584472A JPS5213195B2 JP S5213195 B2 JPS5213195 B2 JP S5213195B2 JP 5584472 A JP5584472 A JP 5584472A JP 5584472 A JP5584472 A JP 5584472A JP S5213195 B2 JPS5213195 B2 JP S5213195B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5584472A JPS5213195B2 (lm) | 1972-06-05 | 1972-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5584472A JPS5213195B2 (lm) | 1972-06-05 | 1972-06-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4917674A JPS4917674A (lm) | 1974-02-16 |
| JPS5213195B2 true JPS5213195B2 (lm) | 1977-04-12 |
Family
ID=13010310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5584472A Expired JPS5213195B2 (lm) | 1972-06-05 | 1972-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5213195B2 (lm) |
-
1972
- 1972-06-05 JP JP5584472A patent/JPS5213195B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4917674A (lm) | 1974-02-16 |