JPS52131948U - - Google Patents

Info

Publication number
JPS52131948U
JPS52131948U JP1976040624U JP4062476U JPS52131948U JP S52131948 U JPS52131948 U JP S52131948U JP 1976040624 U JP1976040624 U JP 1976040624U JP 4062476 U JP4062476 U JP 4062476U JP S52131948 U JPS52131948 U JP S52131948U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1976040624U
Other languages
Japanese (ja)
Other versions
JPS5438853Y2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976040624U priority Critical patent/JPS5438853Y2/ja
Publication of JPS52131948U publication Critical patent/JPS52131948U/ja
Application granted granted Critical
Publication of JPS5438853Y2 publication Critical patent/JPS5438853Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1976040624U 1976-04-01 1976-04-01 Expired JPS5438853Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976040624U JPS5438853Y2 (cg-RX-API-DMAC10.html) 1976-04-01 1976-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976040624U JPS5438853Y2 (cg-RX-API-DMAC10.html) 1976-04-01 1976-04-01

Publications (2)

Publication Number Publication Date
JPS52131948U true JPS52131948U (cg-RX-API-DMAC10.html) 1977-10-06
JPS5438853Y2 JPS5438853Y2 (cg-RX-API-DMAC10.html) 1979-11-17

Family

ID=28499735

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976040624U Expired JPS5438853Y2 (cg-RX-API-DMAC10.html) 1976-04-01 1976-04-01

Country Status (1)

Country Link
JP (1) JPS5438853Y2 (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPS5438853Y2 (cg-RX-API-DMAC10.html) 1979-11-17

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