JPS52130679U - - Google Patents
Info
- Publication number
- JPS52130679U JPS52130679U JP3899976U JP3899976U JPS52130679U JP S52130679 U JPS52130679 U JP S52130679U JP 3899976 U JP3899976 U JP 3899976U JP 3899976 U JP3899976 U JP 3899976U JP S52130679 U JPS52130679 U JP S52130679U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976038999U JPS5612837Y2 (https=) | 1976-03-31 | 1976-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976038999U JPS5612837Y2 (https=) | 1976-03-31 | 1976-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52130679U true JPS52130679U (https=) | 1977-10-04 |
| JPS5612837Y2 JPS5612837Y2 (https=) | 1981-03-25 |
Family
ID=28498170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976038999U Expired JPS5612837Y2 (https=) | 1976-03-31 | 1976-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5612837Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5471992A (en) * | 1977-11-18 | 1979-06-08 | Cho Lsi Gijutsu Kenkyu Kumiai | Electron beam shaping aperture mask |
| JPS55163840A (en) * | 1979-06-06 | 1980-12-20 | Fujitsu Ltd | Electron beam exposure device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5084176A (https=) * | 1973-11-26 | 1975-07-07 |
-
1976
- 1976-03-31 JP JP1976038999U patent/JPS5612837Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5084176A (https=) * | 1973-11-26 | 1975-07-07 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5471992A (en) * | 1977-11-18 | 1979-06-08 | Cho Lsi Gijutsu Kenkyu Kumiai | Electron beam shaping aperture mask |
| JPS55163840A (en) * | 1979-06-06 | 1980-12-20 | Fujitsu Ltd | Electron beam exposure device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5612837Y2 (https=) | 1981-03-25 |