JPS52127477U - - Google Patents
Info
- Publication number
- JPS52127477U JPS52127477U JP3606776U JP3606776U JPS52127477U JP S52127477 U JPS52127477 U JP S52127477U JP 3606776 U JP3606776 U JP 3606776U JP 3606776 U JP3606776 U JP 3606776U JP S52127477 U JPS52127477 U JP S52127477U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3606776U JPS52127477U (ja) | 1976-03-25 | 1976-03-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3606776U JPS52127477U (ja) | 1976-03-25 | 1976-03-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52127477U true JPS52127477U (ja) | 1977-09-28 |
Family
ID=28495380
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3606776U Pending JPS52127477U (ja) | 1976-03-25 | 1976-03-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52127477U (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01210831A (ja) * | 1988-02-18 | 1989-08-24 | Tel Sagami Ltd | 成膜装置 |
WO2020145183A1 (ja) * | 2019-01-07 | 2020-07-16 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法およびヒータユニット |
-
1976
- 1976-03-25 JP JP3606776U patent/JPS52127477U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01210831A (ja) * | 1988-02-18 | 1989-08-24 | Tel Sagami Ltd | 成膜装置 |
WO2020145183A1 (ja) * | 2019-01-07 | 2020-07-16 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法およびヒータユニット |
JPWO2020145183A1 (ja) * | 2019-01-07 | 2021-10-21 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法およびヒータユニット |