JPS52126760U - - Google Patents
Info
- Publication number
- JPS52126760U JPS52126760U JP3530576U JP3530576U JPS52126760U JP S52126760 U JPS52126760 U JP S52126760U JP 3530576 U JP3530576 U JP 3530576U JP 3530576 U JP3530576 U JP 3530576U JP S52126760 U JPS52126760 U JP S52126760U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3530576U JPS52126760U (enExample) | 1976-03-24 | 1976-03-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3530576U JPS52126760U (enExample) | 1976-03-24 | 1976-03-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52126760U true JPS52126760U (enExample) | 1977-09-27 |
Family
ID=28494655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3530576U Pending JPS52126760U (enExample) | 1976-03-24 | 1976-03-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52126760U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62118526A (ja) * | 1985-09-27 | 1987-05-29 | エイ・ティ・アンド・ティ・コーポレーション | 荷電粒子ビ−ム リソグラフイ−方法および装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3638231A (en) * | 1968-05-27 | 1972-01-25 | Tno | Device for recording with electron rays |
| JPS5091274A (enExample) * | 1973-12-12 | 1975-07-21 |
-
1976
- 1976-03-24 JP JP3530576U patent/JPS52126760U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3638231A (en) * | 1968-05-27 | 1972-01-25 | Tno | Device for recording with electron rays |
| JPS5091274A (enExample) * | 1973-12-12 | 1975-07-21 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62118526A (ja) * | 1985-09-27 | 1987-05-29 | エイ・ティ・アンド・ティ・コーポレーション | 荷電粒子ビ−ム リソグラフイ−方法および装置 |