JPS52126174A - Microwave discharge device - Google Patents

Microwave discharge device

Info

Publication number
JPS52126174A
JPS52126174A JP4278776A JP4278776A JPS52126174A JP S52126174 A JPS52126174 A JP S52126174A JP 4278776 A JP4278776 A JP 4278776A JP 4278776 A JP4278776 A JP 4278776A JP S52126174 A JPS52126174 A JP S52126174A
Authority
JP
Japan
Prior art keywords
discharge device
microwave discharge
microwave
forming
circular waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4278776A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5334461B2 (Direct
Inventor
Keizo Suzuki
Sadayuki Okudaira
Ichiro Shikamata
Kuniyuki Sakumichi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4278776A priority Critical patent/JPS52126174A/ja
Priority to GB15644/77A priority patent/GB1523267A/en
Priority to DE2716592A priority patent/DE2716592C3/de
Priority to US05/787,878 priority patent/US4101411A/en
Publication of JPS52126174A publication Critical patent/JPS52126174A/ja
Publication of JPS5334461B2 publication Critical patent/JPS5334461B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP4278776A 1976-04-15 1976-04-15 Microwave discharge device Granted JPS52126174A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP4278776A JPS52126174A (en) 1976-04-15 1976-04-15 Microwave discharge device
GB15644/77A GB1523267A (en) 1976-04-15 1977-04-14 Plasma etching apparatus
DE2716592A DE2716592C3 (de) 1976-04-15 1977-04-14 Plasma-Ätzvorrichtung
US05/787,878 US4101411A (en) 1976-04-15 1977-04-15 Plasma etching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4278776A JPS52126174A (en) 1976-04-15 1976-04-15 Microwave discharge device

Publications (2)

Publication Number Publication Date
JPS52126174A true JPS52126174A (en) 1977-10-22
JPS5334461B2 JPS5334461B2 (Direct) 1978-09-20

Family

ID=12645665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4278776A Granted JPS52126174A (en) 1976-04-15 1976-04-15 Microwave discharge device

Country Status (1)

Country Link
JP (1) JPS52126174A (Direct)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5875839A (ja) * 1981-10-30 1983-05-07 Fujitsu Ltd スパツタ装置
JPS63318127A (ja) * 1987-06-19 1988-12-27 Sumitomo Metal Ind Ltd プラズマプロセス装置
JPH03500706A (ja) * 1987-06-22 1991-02-14 アプライド　サイエンス　アンド　テクノロジー，インコーポレーテッド マイクロウェーブプラズマ発生器
US5242539A (en) * 1991-04-04 1993-09-07 Hitachi, Ltd. Plasma treatment method and apparatus
US5368685A (en) * 1992-03-24 1994-11-29 Hitachi, Ltd. Dry etching apparatus and method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5875839A (ja) * 1981-10-30 1983-05-07 Fujitsu Ltd スパツタ装置
JPS63318127A (ja) * 1987-06-19 1988-12-27 Sumitomo Metal Ind Ltd プラズマプロセス装置
JPH03500706A (ja) * 1987-06-22 1991-02-14 アプライド　サイエンス　アンド　テクノロジー，インコーポレーテッド マイクロウェーブプラズマ発生器
US5242539A (en) * 1991-04-04 1993-09-07 Hitachi, Ltd. Plasma treatment method and apparatus
US5368685A (en) * 1992-03-24 1994-11-29 Hitachi, Ltd. Dry etching apparatus and method

Also Published As

Publication number Publication date
JPS5334461B2 (Direct) 1978-09-20

Similar Documents

Publication Publication Date Title
JPS5278188A (en) Automatic pipe cutting device
JPS52126174A (en) Microwave discharge device
JPS5229689A (en) Steel plate slitting machine
JPS5230938A (en) Microwave heating appartus
JPS5249325A (en) Process for cutting inorganic fibers finely
JPS5230939A (en) Microwave heating process
JPS5226642A (en) High frequency heating device
JPS51125356A (en) Process for preparing 4-hydroxycyclopent -2-ene-1-one
JPS5382039A (en) Constant temperature control apparatus
JPS51131964A (en) Filter device
JPS5214577A (en) Contacting apparatus
JPS52134148A (en) High frequency heating apparatus
JPS5220577A (en) Plate glass transfer apparatus
JPS51142785A (en) High speed cutting device
JPS51137896A (en) Power feeding apparatus
JPS51123887A (en) Method for preparing l-cysteine
JPS5244969A (en) Plate conveying apparatus
JPS5224537A (en) Slide preparing device
JPS5229985A (en) Cover stripping apparatus for multi-core wires
JPS51132772A (en) Baking apparatus
JPS5429941A (en) Interruption control system
JPS5213167A (en) Filtering material
JPS5217609A (en) Motor
JPS5222146A (en) High-frequency heating apparatus
JPS51118836A (en) A mosquito-repellent incense