JPS52126160A - Magetic field type electronic lens - Google Patents

Magetic field type electronic lens

Info

Publication number
JPS52126160A
JPS52126160A JP4246076A JP4246076A JPS52126160A JP S52126160 A JPS52126160 A JP S52126160A JP 4246076 A JP4246076 A JP 4246076A JP 4246076 A JP4246076 A JP 4246076A JP S52126160 A JPS52126160 A JP S52126160A
Authority
JP
Japan
Prior art keywords
type electronic
field type
electronic lens
magetic field
magetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4246076A
Other languages
Japanese (ja)
Inventor
Shozo Kasai
Hisashi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4246076A priority Critical patent/JPS52126160A/en
Publication of JPS52126160A publication Critical patent/JPS52126160A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To designa magnetic path so that pole void becomes minus tolerance and to absorb an alteration of the pole void portion by a non-magnetic material spacer.
COPYRIGHT: (C)1977,JPO&Japio
JP4246076A 1976-04-16 1976-04-16 Magetic field type electronic lens Pending JPS52126160A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4246076A JPS52126160A (en) 1976-04-16 1976-04-16 Magetic field type electronic lens

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4246076A JPS52126160A (en) 1976-04-16 1976-04-16 Magetic field type electronic lens

Publications (1)

Publication Number Publication Date
JPS52126160A true JPS52126160A (en) 1977-10-22

Family

ID=12636673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4246076A Pending JPS52126160A (en) 1976-04-16 1976-04-16 Magetic field type electronic lens

Country Status (1)

Country Link
JP (1) JPS52126160A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1530229A1 (en) * 2003-11-04 2005-05-11 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam optical component for charged particle beams

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1530229A1 (en) * 2003-11-04 2005-05-11 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam optical component for charged particle beams
WO2005043579A1 (en) * 2003-11-04 2005-05-12 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam optical component for charged particle beams
US7675042B2 (en) 2003-11-04 2010-03-09 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Beam optical component for charged particle beams

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