JPS52125429A - Method of etching alumina plates - Google Patents
Method of etching alumina platesInfo
- Publication number
- JPS52125429A JPS52125429A JP4323976A JP4323976A JPS52125429A JP S52125429 A JPS52125429 A JP S52125429A JP 4323976 A JP4323976 A JP 4323976A JP 4323976 A JP4323976 A JP 4323976A JP S52125429 A JPS52125429 A JP S52125429A
- Authority
- JP
- Japan
- Prior art keywords
- alumina plates
- etching alumina
- etching
- plates
- alumina
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4323976A JPS52125429A (en) | 1976-04-15 | 1976-04-15 | Method of etching alumina plates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4323976A JPS52125429A (en) | 1976-04-15 | 1976-04-15 | Method of etching alumina plates |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52125429A true JPS52125429A (en) | 1977-10-21 |
Family
ID=12658339
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4323976A Pending JPS52125429A (en) | 1976-04-15 | 1976-04-15 | Method of etching alumina plates |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52125429A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55132038A (en) * | 1979-04-02 | 1980-10-14 | Matsushita Electronics Corp | Forming method for metallic electrode on semiconductor substrate |
JPS6037130A (en) * | 1983-08-10 | 1985-02-26 | Comput Basic Mach Technol Res Assoc | Patterning method of thin-film |
-
1976
- 1976-04-15 JP JP4323976A patent/JPS52125429A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55132038A (en) * | 1979-04-02 | 1980-10-14 | Matsushita Electronics Corp | Forming method for metallic electrode on semiconductor substrate |
JPS6037130A (en) * | 1983-08-10 | 1985-02-26 | Comput Basic Mach Technol Res Assoc | Patterning method of thin-film |
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