JPS5211989Y2 - - Google Patents
Info
- Publication number
- JPS5211989Y2 JPS5211989Y2 JP1972075881U JP7588172U JPS5211989Y2 JP S5211989 Y2 JPS5211989 Y2 JP S5211989Y2 JP 1972075881 U JP1972075881 U JP 1972075881U JP 7588172 U JP7588172 U JP 7588172U JP S5211989 Y2 JPS5211989 Y2 JP S5211989Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1972075881U JPS5211989Y2 (en) | 1972-06-27 | 1972-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1972075881U JPS5211989Y2 (en) | 1972-06-27 | 1972-06-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4933186U JPS4933186U (en) | 1974-03-23 |
| JPS5211989Y2 true JPS5211989Y2 (en) | 1977-03-16 |
Family
ID=27977957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1972075881U Expired JPS5211989Y2 (en) | 1972-06-27 | 1972-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5211989Y2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5810193B2 (en) * | 1974-08-02 | 1983-02-24 | 株式会社日立製作所 | lapping couch |
| DE2451549A1 (en) * | 1974-10-30 | 1976-08-12 | Mueller Georg Kugellager | LOADING AND UNLOADING DEVICE FOR PLATE-SHAPED SEMI-CONDUCTOR MATERIALS |
| JPS58132458A (en) * | 1982-01-25 | 1983-08-06 | Hoya Corp | Method and equipment for polishing flat surface of hard and brittle plate |
-
1972
- 1972-06-27 JP JP1972075881U patent/JPS5211989Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4933186U (en) | 1974-03-23 |