JPS52117572A - Electronic beam exposure unit - Google Patents
Electronic beam exposure unitInfo
- Publication number
- JPS52117572A JPS52117572A JP3417976A JP3417976A JPS52117572A JP S52117572 A JPS52117572 A JP S52117572A JP 3417976 A JP3417976 A JP 3417976A JP 3417976 A JP3417976 A JP 3417976A JP S52117572 A JPS52117572 A JP S52117572A
- Authority
- JP
- Japan
- Prior art keywords
- exposure unit
- beam exposure
- electronic beam
- continuous feeding
- feeding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3417976A JPS52117572A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposure unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3417976A JPS52117572A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposure unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52117572A true JPS52117572A (en) | 1977-10-03 |
Family
ID=12406971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3417976A Pending JPS52117572A (en) | 1976-03-30 | 1976-03-30 | Electronic beam exposure unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52117572A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57183743U (ja) * | 1981-05-18 | 1982-11-20 |
-
1976
- 1976-03-30 JP JP3417976A patent/JPS52117572A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57183743U (ja) * | 1981-05-18 | 1982-11-20 |
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