JPS52114567A - Reaction furnace - Google Patents

Reaction furnace

Info

Publication number
JPS52114567A
JPS52114567A JP3120676A JP3120676A JPS52114567A JP S52114567 A JPS52114567 A JP S52114567A JP 3120676 A JP3120676 A JP 3120676A JP 3120676 A JP3120676 A JP 3120676A JP S52114567 A JPS52114567 A JP S52114567A
Authority
JP
Japan
Prior art keywords
reaction furnace
reaction
gas
inlet
furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3120676A
Other languages
Japanese (ja)
Other versions
JPS5912741B2 (en
Inventor
Hiroto Nagatomo
Masakuni Akiba
Yukio Misonoo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3120676A priority Critical patent/JPS5912741B2/en
Publication of JPS52114567A publication Critical patent/JPS52114567A/en
Publication of JPS5912741B2 publication Critical patent/JPS5912741B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
  • Tunnel Furnaces (AREA)

Abstract

PURPOSE:To increase reaction capacity of a reaction gas with a sample by equipping at least one inlet for the reaction gas at the center of a reaction furnace which is long sideways and an outlet at each side of the gas inlet.
JP3120676A 1976-03-24 1976-03-24 reactor Expired JPS5912741B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3120676A JPS5912741B2 (en) 1976-03-24 1976-03-24 reactor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3120676A JPS5912741B2 (en) 1976-03-24 1976-03-24 reactor

Publications (2)

Publication Number Publication Date
JPS52114567A true JPS52114567A (en) 1977-09-26
JPS5912741B2 JPS5912741B2 (en) 1984-03-26

Family

ID=12324934

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3120676A Expired JPS5912741B2 (en) 1976-03-24 1976-03-24 reactor

Country Status (1)

Country Link
JP (1) JPS5912741B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176814U (en) * 1984-10-24 1986-05-23

Also Published As

Publication number Publication date
JPS5912741B2 (en) 1984-03-26

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