JPS52114439A - Method of ion plating insulating materials - Google Patents

Method of ion plating insulating materials

Info

Publication number
JPS52114439A
JPS52114439A JP3096476A JP3096476A JPS52114439A JP S52114439 A JPS52114439 A JP S52114439A JP 3096476 A JP3096476 A JP 3096476A JP 3096476 A JP3096476 A JP 3096476A JP S52114439 A JPS52114439 A JP S52114439A
Authority
JP
Japan
Prior art keywords
insulating materials
ion plating
plating insulating
ion
materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3096476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5511743B2 (enrdf_load_stackoverflow
Inventor
Hideo Yoshihara
Kaoru Bokuen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP3096476A priority Critical patent/JPS52114439A/ja
Publication of JPS52114439A publication Critical patent/JPS52114439A/ja
Publication of JPS5511743B2 publication Critical patent/JPS5511743B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3096476A 1976-03-22 1976-03-22 Method of ion plating insulating materials Granted JPS52114439A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3096476A JPS52114439A (en) 1976-03-22 1976-03-22 Method of ion plating insulating materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3096476A JPS52114439A (en) 1976-03-22 1976-03-22 Method of ion plating insulating materials

Publications (2)

Publication Number Publication Date
JPS52114439A true JPS52114439A (en) 1977-09-26
JPS5511743B2 JPS5511743B2 (enrdf_load_stackoverflow) 1980-03-27

Family

ID=12318346

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3096476A Granted JPS52114439A (en) 1976-03-22 1976-03-22 Method of ion plating insulating materials

Country Status (1)

Country Link
JP (1) JPS52114439A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5511743B2 (enrdf_load_stackoverflow) 1980-03-27

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