JPS52114196A - Ion beam finishing device - Google Patents

Ion beam finishing device

Info

Publication number
JPS52114196A
JPS52114196A JP2993476A JP2993476A JPS52114196A JP S52114196 A JPS52114196 A JP S52114196A JP 2993476 A JP2993476 A JP 2993476A JP 2993476 A JP2993476 A JP 2993476A JP S52114196 A JPS52114196 A JP S52114196A
Authority
JP
Japan
Prior art keywords
ion beam
finishing device
finishing
beam finishing
finishment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2993476A
Other languages
Japanese (ja)
Inventor
Sumio Hosaka
Yataro Kondo
Seiya Hashimoto
Susumu Takahashi
Kiyoshi Ishikawa
Norio Kanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2993476A priority Critical patent/JPS52114196A/en
Publication of JPS52114196A publication Critical patent/JPS52114196A/en
Pending legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)

Abstract

PURPOSE: To achieve the ion beam finishing device which enables to provided the ion beam finishing, a monitoring of the finishing portion during the finishing and an observation of fine forms of the material to be ground after the finishment, within a same device.
COPYRIGHT: (C)1977,JPO&Japio
JP2993476A 1976-03-22 1976-03-22 Ion beam finishing device Pending JPS52114196A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2993476A JPS52114196A (en) 1976-03-22 1976-03-22 Ion beam finishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2993476A JPS52114196A (en) 1976-03-22 1976-03-22 Ion beam finishing device

Publications (1)

Publication Number Publication Date
JPS52114196A true JPS52114196A (en) 1977-09-24

Family

ID=12289803

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2993476A Pending JPS52114196A (en) 1976-03-22 1976-03-22 Ion beam finishing device

Country Status (1)

Country Link
JP (1) JPS52114196A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202547A (en) * 1982-05-21 1983-11-25 Hitachi Ltd Integrated circuit device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58202547A (en) * 1982-05-21 1983-11-25 Hitachi Ltd Integrated circuit device

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