JPS52114196A - Ion beam finishing device - Google Patents
Ion beam finishing deviceInfo
- Publication number
- JPS52114196A JPS52114196A JP2993476A JP2993476A JPS52114196A JP S52114196 A JPS52114196 A JP S52114196A JP 2993476 A JP2993476 A JP 2993476A JP 2993476 A JP2993476 A JP 2993476A JP S52114196 A JPS52114196 A JP S52114196A
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- finishing device
- finishing
- beam finishing
- finishment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Welding Or Cutting Using Electron Beams (AREA)
Abstract
PURPOSE: To achieve the ion beam finishing device which enables to provided the ion beam finishing, a monitoring of the finishing portion during the finishing and an observation of fine forms of the material to be ground after the finishment, within a same device.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2993476A JPS52114196A (en) | 1976-03-22 | 1976-03-22 | Ion beam finishing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2993476A JPS52114196A (en) | 1976-03-22 | 1976-03-22 | Ion beam finishing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52114196A true JPS52114196A (en) | 1977-09-24 |
Family
ID=12289803
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2993476A Pending JPS52114196A (en) | 1976-03-22 | 1976-03-22 | Ion beam finishing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52114196A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58202547A (en) * | 1982-05-21 | 1983-11-25 | Hitachi Ltd | Integrated circuit device |
-
1976
- 1976-03-22 JP JP2993476A patent/JPS52114196A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58202547A (en) * | 1982-05-21 | 1983-11-25 | Hitachi Ltd | Integrated circuit device |
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