JPS52114122A - Flow control valve - Google Patents

Flow control valve

Info

Publication number
JPS52114122A
JPS52114122A JP3161976A JP3161976A JPS52114122A JP S52114122 A JPS52114122 A JP S52114122A JP 3161976 A JP3161976 A JP 3161976A JP 3161976 A JP3161976 A JP 3161976A JP S52114122 A JPS52114122 A JP S52114122A
Authority
JP
Japan
Prior art keywords
control valve
flow control
flow
valve
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3161976A
Other languages
Japanese (ja)
Inventor
Shigeru Shirai
Takashi Tanahashi
Masaji Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3161976A priority Critical patent/JPS52114122A/en
Publication of JPS52114122A publication Critical patent/JPS52114122A/en
Pending legal-status Critical Current

Links

Landscapes

  • Magnetically Actuated Valves (AREA)
JP3161976A 1976-03-22 1976-03-22 Flow control valve Pending JPS52114122A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3161976A JPS52114122A (en) 1976-03-22 1976-03-22 Flow control valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3161976A JPS52114122A (en) 1976-03-22 1976-03-22 Flow control valve

Publications (1)

Publication Number Publication Date
JPS52114122A true JPS52114122A (en) 1977-09-24

Family

ID=12336219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3161976A Pending JPS52114122A (en) 1976-03-22 1976-03-22 Flow control valve

Country Status (1)

Country Link
JP (1) JPS52114122A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020159477A (en) * 2019-03-27 2020-10-01 株式会社フジキン Valve device, fluid control device using this valve device and semiconductor manufacturing device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020159477A (en) * 2019-03-27 2020-10-01 株式会社フジキン Valve device, fluid control device using this valve device and semiconductor manufacturing device

Similar Documents

Publication Publication Date Title
JPS531325A (en) Flow control valve
JPS52154913A (en) Fluid control valve
JPS52122928A (en) Flow control valve
JPS52153233A (en) Flow rate control valve
JPS53101126A (en) Flow quantity controlling valve
JPS5314419A (en) Control valve
JPS5291701A (en) Fluid control valve
GB1545648A (en) Control valve
JPS5346592A (en) Control valve
JPS5336036A (en) Fluid control valve
ZA772626B (en) Flow regulating valve
GB1552818A (en) Fluid control valve
JPS53435A (en) Flow regulating valve
JPS5318823A (en) Flow control valve
HK35082A (en) Control valve
GB1546535A (en) Flow control valve
JPS52112825A (en) Flow control valve
MY8000142A (en) Fluid flow control valve
JPS5338823A (en) Control valve
GB1556136A (en) Control valve
JPS5313226A (en) Fluid stream control valve
GB1539340A (en) Control valve
JPS52143517A (en) Control valve
JPS5348230A (en) Control valve
JPS52114125A (en) Flow control valve