JPS52114122A - Flow control valve - Google Patents
Flow control valveInfo
- Publication number
- JPS52114122A JPS52114122A JP3161976A JP3161976A JPS52114122A JP S52114122 A JPS52114122 A JP S52114122A JP 3161976 A JP3161976 A JP 3161976A JP 3161976 A JP3161976 A JP 3161976A JP S52114122 A JPS52114122 A JP S52114122A
- Authority
- JP
- Japan
- Prior art keywords
- control valve
- flow control
- flow
- valve
- control
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetically Actuated Valves (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3161976A JPS52114122A (en) | 1976-03-22 | 1976-03-22 | Flow control valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3161976A JPS52114122A (en) | 1976-03-22 | 1976-03-22 | Flow control valve |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52114122A true JPS52114122A (en) | 1977-09-24 |
Family
ID=12336219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3161976A Pending JPS52114122A (en) | 1976-03-22 | 1976-03-22 | Flow control valve |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52114122A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020159477A (en) * | 2019-03-27 | 2020-10-01 | 株式会社フジキン | Valve device, fluid control device using this valve device and semiconductor manufacturing device |
-
1976
- 1976-03-22 JP JP3161976A patent/JPS52114122A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020159477A (en) * | 2019-03-27 | 2020-10-01 | 株式会社フジキン | Valve device, fluid control device using this valve device and semiconductor manufacturing device |
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