JPS52113858U - - Google Patents
Info
- Publication number
- JPS52113858U JPS52113858U JP2012576U JP2012576U JPS52113858U JP S52113858 U JPS52113858 U JP S52113858U JP 2012576 U JP2012576 U JP 2012576U JP 2012576 U JP2012576 U JP 2012576U JP S52113858 U JPS52113858 U JP S52113858U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976020125U JPS5528753Y2 (fr) | 1976-02-24 | 1976-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976020125U JPS5528753Y2 (fr) | 1976-02-24 | 1976-02-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52113858U true JPS52113858U (fr) | 1977-08-30 |
| JPS5528753Y2 JPS5528753Y2 (fr) | 1980-07-09 |
Family
ID=28480159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976020125U Expired JPS5528753Y2 (fr) | 1976-02-24 | 1976-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5528753Y2 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013194300A (ja) * | 2012-03-21 | 2013-09-30 | Ulvac Japan Ltd | スパッタリング装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4986350B2 (ja) * | 2001-08-28 | 2012-07-25 | アプライド マテリアルズ インコーポレイテッド | スパッタリング装置のマグネトロンユニット及びスパッタリング装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5295581A (en) * | 1976-02-09 | 1977-08-11 | Anelva Corp | Sputiering apparatus |
-
1976
- 1976-02-24 JP JP1976020125U patent/JPS5528753Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5295581A (en) * | 1976-02-09 | 1977-08-11 | Anelva Corp | Sputiering apparatus |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013194300A (ja) * | 2012-03-21 | 2013-09-30 | Ulvac Japan Ltd | スパッタリング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5528753Y2 (fr) | 1980-07-09 |