JPS52113858U - - Google Patents

Info

Publication number
JPS52113858U
JPS52113858U JP2012576U JP2012576U JPS52113858U JP S52113858 U JPS52113858 U JP S52113858U JP 2012576 U JP2012576 U JP 2012576U JP 2012576 U JP2012576 U JP 2012576U JP S52113858 U JPS52113858 U JP S52113858U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012576U
Other languages
Japanese (ja)
Other versions
JPS5528753Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976020125U priority Critical patent/JPS5528753Y2/ja
Publication of JPS52113858U publication Critical patent/JPS52113858U/ja
Application granted granted Critical
Publication of JPS5528753Y2 publication Critical patent/JPS5528753Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1976020125U 1976-02-24 1976-02-24 Expired JPS5528753Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976020125U JPS5528753Y2 (enrdf_load_stackoverflow) 1976-02-24 1976-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976020125U JPS5528753Y2 (enrdf_load_stackoverflow) 1976-02-24 1976-02-24

Publications (2)

Publication Number Publication Date
JPS52113858U true JPS52113858U (enrdf_load_stackoverflow) 1977-08-30
JPS5528753Y2 JPS5528753Y2 (enrdf_load_stackoverflow) 1980-07-09

Family

ID=28480159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976020125U Expired JPS5528753Y2 (enrdf_load_stackoverflow) 1976-02-24 1976-02-24

Country Status (1)

Country Link
JP (1) JPS5528753Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013194300A (ja) * 2012-03-21 2013-09-30 Ulvac Japan Ltd スパッタリング装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4986350B2 (ja) * 2001-08-28 2012-07-25 アプライド マテリアルズ インコーポレイテッド スパッタリング装置のマグネトロンユニット及びスパッタリング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295581A (en) * 1976-02-09 1977-08-11 Anelva Corp Sputiering apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295581A (en) * 1976-02-09 1977-08-11 Anelva Corp Sputiering apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013194300A (ja) * 2012-03-21 2013-09-30 Ulvac Japan Ltd スパッタリング装置

Also Published As

Publication number Publication date
JPS5528753Y2 (enrdf_load_stackoverflow) 1980-07-09

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