JPS52113858U - - Google Patents
Info
- Publication number
- JPS52113858U JPS52113858U JP2012576U JP2012576U JPS52113858U JP S52113858 U JPS52113858 U JP S52113858U JP 2012576 U JP2012576 U JP 2012576U JP 2012576 U JP2012576 U JP 2012576U JP S52113858 U JPS52113858 U JP S52113858U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976020125U JPS5528753Y2 (en) | 1976-02-24 | 1976-02-24 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976020125U JPS5528753Y2 (en) | 1976-02-24 | 1976-02-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52113858U true JPS52113858U (en) | 1977-08-30 |
JPS5528753Y2 JPS5528753Y2 (en) | 1980-07-09 |
Family
ID=28480159
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1976020125U Expired JPS5528753Y2 (en) | 1976-02-24 | 1976-02-24 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5528753Y2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013194300A (en) * | 2012-03-21 | 2013-09-30 | Ulvac Japan Ltd | Sputtering apparatus |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4986350B2 (en) * | 2001-08-28 | 2012-07-25 | アプライド マテリアルズ インコーポレイテッド | Magnetron unit of sputtering apparatus and sputtering apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5295581A (en) * | 1976-02-09 | 1977-08-11 | Anelva Corp | Sputiering apparatus |
-
1976
- 1976-02-24 JP JP1976020125U patent/JPS5528753Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5295581A (en) * | 1976-02-09 | 1977-08-11 | Anelva Corp | Sputiering apparatus |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013194300A (en) * | 2012-03-21 | 2013-09-30 | Ulvac Japan Ltd | Sputtering apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5528753Y2 (en) | 1980-07-09 |