JPS52113432U - - Google Patents
Info
- Publication number
- JPS52113432U JPS52113432U JP2203976U JP2203976U JPS52113432U JP S52113432 U JPS52113432 U JP S52113432U JP 2203976 U JP2203976 U JP 2203976U JP 2203976 U JP2203976 U JP 2203976U JP S52113432 U JPS52113432 U JP S52113432U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Temperature-Responsive Valves (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Mechanically-Actuated Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976022039U JPS5634214Y2 (https=) | 1976-02-25 | 1976-02-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976022039U JPS5634214Y2 (https=) | 1976-02-25 | 1976-02-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52113432U true JPS52113432U (https=) | 1977-08-29 |
| JPS5634214Y2 JPS5634214Y2 (https=) | 1981-08-13 |
Family
ID=28482011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976022039U Expired JPS5634214Y2 (https=) | 1976-02-25 | 1976-02-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5634214Y2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6343084A (ja) * | 1986-08-07 | 1988-02-24 | プラズマインベント アクチエンゲゼルシヤフト | ガス状物質の質量流量調節弁 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5095818A (https=) * | 1973-12-20 | 1975-07-30 |
-
1976
- 1976-02-25 JP JP1976022039U patent/JPS5634214Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5095818A (https=) * | 1973-12-20 | 1975-07-30 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6343084A (ja) * | 1986-08-07 | 1988-02-24 | プラズマインベント アクチエンゲゼルシヤフト | ガス状物質の質量流量調節弁 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5634214Y2 (https=) | 1981-08-13 |