JPS52113432U - - Google Patents

Info

Publication number
JPS52113432U
JPS52113432U JP2203976U JP2203976U JPS52113432U JP S52113432 U JPS52113432 U JP S52113432U JP 2203976 U JP2203976 U JP 2203976U JP 2203976 U JP2203976 U JP 2203976U JP S52113432 U JPS52113432 U JP S52113432U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2203976U
Other languages
Japanese (ja)
Other versions
JPS5634214Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976022039U priority Critical patent/JPS5634214Y2/ja
Publication of JPS52113432U publication Critical patent/JPS52113432U/ja
Application granted granted Critical
Publication of JPS5634214Y2 publication Critical patent/JPS5634214Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Temperature-Responsive Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Mechanically-Actuated Valves (AREA)
JP1976022039U 1976-02-25 1976-02-25 Expired JPS5634214Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976022039U JPS5634214Y2 (enrdf_load_stackoverflow) 1976-02-25 1976-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976022039U JPS5634214Y2 (enrdf_load_stackoverflow) 1976-02-25 1976-02-25

Publications (2)

Publication Number Publication Date
JPS52113432U true JPS52113432U (enrdf_load_stackoverflow) 1977-08-29
JPS5634214Y2 JPS5634214Y2 (enrdf_load_stackoverflow) 1981-08-13

Family

ID=28482011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976022039U Expired JPS5634214Y2 (enrdf_load_stackoverflow) 1976-02-25 1976-02-25

Country Status (1)

Country Link
JP (1) JPS5634214Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6343084A (ja) * 1986-08-07 1988-02-24 プラズマインベント　アクチエンゲゼルシヤフト ガス状物質の質量流量調節弁

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5095818A (enrdf_load_stackoverflow) * 1973-12-20 1975-07-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5095818A (enrdf_load_stackoverflow) * 1973-12-20 1975-07-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6343084A (ja) * 1986-08-07 1988-02-24 プラズマインベント　アクチエンゲゼルシヤフト ガス状物質の質量流量調節弁

Also Published As

Publication number Publication date
JPS5634214Y2 (enrdf_load_stackoverflow) 1981-08-13

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