JPS52113432U - - Google Patents

Info

Publication number
JPS52113432U
JPS52113432U JP2203976U JP2203976U JPS52113432U JP S52113432 U JPS52113432 U JP S52113432U JP 2203976 U JP2203976 U JP 2203976U JP 2203976 U JP2203976 U JP 2203976U JP S52113432 U JPS52113432 U JP S52113432U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2203976U
Other languages
Japanese (ja)
Other versions
JPS5634214Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976022039U priority Critical patent/JPS5634214Y2/ja
Publication of JPS52113432U publication Critical patent/JPS52113432U/ja
Application granted granted Critical
Publication of JPS5634214Y2 publication Critical patent/JPS5634214Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Mechanically-Actuated Valves (AREA)
  • Temperature-Responsive Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP1976022039U 1976-02-25 1976-02-25 Expired JPS5634214Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976022039U JPS5634214Y2 (de) 1976-02-25 1976-02-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976022039U JPS5634214Y2 (de) 1976-02-25 1976-02-25

Publications (2)

Publication Number Publication Date
JPS52113432U true JPS52113432U (de) 1977-08-29
JPS5634214Y2 JPS5634214Y2 (de) 1981-08-13

Family

ID=28482011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976022039U Expired JPS5634214Y2 (de) 1976-02-25 1976-02-25

Country Status (1)

Country Link
JP (1) JPS5634214Y2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6343084A (ja) * 1986-08-07 1988-02-24 プラズマインベント　アクチエンゲゼルシヤフト ガス状物質の質量流量調節弁

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5095818A (de) * 1973-12-20 1975-07-30

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5095818A (de) * 1973-12-20 1975-07-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6343084A (ja) * 1986-08-07 1988-02-24 プラズマインベント　アクチエンゲゼルシヤフト ガス状物質の質量流量調節弁

Also Published As

Publication number Publication date
JPS5634214Y2 (de) 1981-08-13

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