JPS52112192A - Grinding agent for metals - Google Patents

Grinding agent for metals

Info

Publication number
JPS52112192A
JPS52112192A JP2952276A JP2952276A JPS52112192A JP S52112192 A JPS52112192 A JP S52112192A JP 2952276 A JP2952276 A JP 2952276A JP 2952276 A JP2952276 A JP 2952276A JP S52112192 A JPS52112192 A JP S52112192A
Authority
JP
Japan
Prior art keywords
metals
grinding agent
grinding
agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2952276A
Other languages
Japanese (ja)
Inventor
Satofumi Miyaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2952276A priority Critical patent/JPS52112192A/en
Publication of JPS52112192A publication Critical patent/JPS52112192A/en
Pending legal-status Critical Current

Links

JP2952276A 1976-03-16 1976-03-16 Grinding agent for metals Pending JPS52112192A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2952276A JPS52112192A (en) 1976-03-16 1976-03-16 Grinding agent for metals

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2952276A JPS52112192A (en) 1976-03-16 1976-03-16 Grinding agent for metals

Publications (1)

Publication Number Publication Date
JPS52112192A true JPS52112192A (en) 1977-09-20

Family

ID=12278423

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2952276A Pending JPS52112192A (en) 1976-03-16 1976-03-16 Grinding agent for metals

Country Status (1)

Country Link
JP (1) JPS52112192A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018055985A1 (en) * 2016-09-23 2018-03-29 株式会社フジミインコーポレーテッド Polishing composition, polishing method in which same is used, and method for producing semiconductor substrate

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4868427A (en) * 1971-12-21 1973-09-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4868427A (en) * 1971-12-21 1973-09-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018055985A1 (en) * 2016-09-23 2018-03-29 株式会社フジミインコーポレーテッド Polishing composition, polishing method in which same is used, and method for producing semiconductor substrate
JPWO2018055985A1 (en) * 2016-09-23 2019-07-11 株式会社フジミインコーポレーテッド Polishing composition, and polishing method and semiconductor substrate using the same

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