JPS52110284A - Vacuum evaporation apparatus of activted reaction type - Google Patents
Vacuum evaporation apparatus of activted reaction typeInfo
- Publication number
- JPS52110284A JPS52110284A JP2611676A JP2611676A JPS52110284A JP S52110284 A JPS52110284 A JP S52110284A JP 2611676 A JP2611676 A JP 2611676A JP 2611676 A JP2611676 A JP 2611676A JP S52110284 A JPS52110284 A JP S52110284A
- Authority
- JP
- Japan
- Prior art keywords
- activted
- vacuum evaporation
- reaction type
- evaporation apparatus
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2611676A JPS52110284A (en) | 1976-03-12 | 1976-03-12 | Vacuum evaporation apparatus of activted reaction type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2611676A JPS52110284A (en) | 1976-03-12 | 1976-03-12 | Vacuum evaporation apparatus of activted reaction type |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52110284A true JPS52110284A (en) | 1977-09-16 |
Family
ID=12184600
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2611676A Pending JPS52110284A (en) | 1976-03-12 | 1976-03-12 | Vacuum evaporation apparatus of activted reaction type |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52110284A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106676480A (en) * | 2017-03-10 | 2017-05-17 | 南京大学 | Electron beam evaporation source with the controllable evaporation rate |
-
1976
- 1976-03-12 JP JP2611676A patent/JPS52110284A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106676480A (en) * | 2017-03-10 | 2017-05-17 | 南京大学 | Electron beam evaporation source with the controllable evaporation rate |
CN106676480B (en) * | 2017-03-10 | 2019-11-08 | 南京大学 | A kind of electron beam evaporation source that evaporation rate is controllable |
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