JPS52110284A - Vacuum evaporation apparatus of activted reaction type - Google Patents

Vacuum evaporation apparatus of activted reaction type

Info

Publication number
JPS52110284A
JPS52110284A JP2611676A JP2611676A JPS52110284A JP S52110284 A JPS52110284 A JP S52110284A JP 2611676 A JP2611676 A JP 2611676A JP 2611676 A JP2611676 A JP 2611676A JP S52110284 A JPS52110284 A JP S52110284A
Authority
JP
Japan
Prior art keywords
activted
vacuum evaporation
reaction type
evaporation apparatus
reaction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2611676A
Other languages
Japanese (ja)
Inventor
Yoshifumi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Gakki Co Ltd
Original Assignee
Nippon Gakki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Gakki Co Ltd filed Critical Nippon Gakki Co Ltd
Priority to JP2611676A priority Critical patent/JPS52110284A/en
Publication of JPS52110284A publication Critical patent/JPS52110284A/en
Pending legal-status Critical Current

Links

JP2611676A 1976-03-12 1976-03-12 Vacuum evaporation apparatus of activted reaction type Pending JPS52110284A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2611676A JPS52110284A (en) 1976-03-12 1976-03-12 Vacuum evaporation apparatus of activted reaction type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2611676A JPS52110284A (en) 1976-03-12 1976-03-12 Vacuum evaporation apparatus of activted reaction type

Publications (1)

Publication Number Publication Date
JPS52110284A true JPS52110284A (en) 1977-09-16

Family

ID=12184600

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2611676A Pending JPS52110284A (en) 1976-03-12 1976-03-12 Vacuum evaporation apparatus of activted reaction type

Country Status (1)

Country Link
JP (1) JPS52110284A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106676480A (en) * 2017-03-10 2017-05-17 南京大学 Electron beam evaporation source with the controllable evaporation rate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106676480A (en) * 2017-03-10 2017-05-17 南京大学 Electron beam evaporation source with the controllable evaporation rate
CN106676480B (en) * 2017-03-10 2019-11-08 南京大学 A kind of electron beam evaporation source that evaporation rate is controllable

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