JPS52109451A - Apparatus for generating plasma - Google Patents

Apparatus for generating plasma

Info

Publication number
JPS52109451A
JPS52109451A JP2562776A JP2562776A JPS52109451A JP S52109451 A JPS52109451 A JP S52109451A JP 2562776 A JP2562776 A JP 2562776A JP 2562776 A JP2562776 A JP 2562776A JP S52109451 A JPS52109451 A JP S52109451A
Authority
JP
Japan
Prior art keywords
generating plasma
plasma
generating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2562776A
Other languages
Japanese (ja)
Inventor
Akimichi Koide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP2562776A priority Critical patent/JPS52109451A/en
Publication of JPS52109451A publication Critical patent/JPS52109451A/en
Pending legal-status Critical Current

Links

JP2562776A 1976-03-11 1976-03-11 Apparatus for generating plasma Pending JPS52109451A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2562776A JPS52109451A (en) 1976-03-11 1976-03-11 Apparatus for generating plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2562776A JPS52109451A (en) 1976-03-11 1976-03-11 Apparatus for generating plasma

Publications (1)

Publication Number Publication Date
JPS52109451A true JPS52109451A (en) 1977-09-13

Family

ID=12171097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2562776A Pending JPS52109451A (en) 1976-03-11 1976-03-11 Apparatus for generating plasma

Country Status (1)

Country Link
JP (1) JPS52109451A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59181500A (en) * 1983-01-21 1984-10-15 プラズム．エナ−ジ−．コ−ポレ−シヨン Plasma generator and method therefor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59181500A (en) * 1983-01-21 1984-10-15 プラズム．エナ−ジ−．コ−ポレ−シヨン Plasma generator and method therefor
JPH0560240B2 (en) * 1983-01-21 1993-09-01 Plasma Energy Corp

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