JPS52108381A - Ionnspattering apparatus - Google Patents

Ionnspattering apparatus

Info

Publication number
JPS52108381A
JPS52108381A JP2505376A JP2505376A JPS52108381A JP S52108381 A JPS52108381 A JP S52108381A JP 2505376 A JP2505376 A JP 2505376A JP 2505376 A JP2505376 A JP 2505376A JP S52108381 A JPS52108381 A JP S52108381A
Authority
JP
Japan
Prior art keywords
ionnspattering
ionnspattering apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2505376A
Other languages
English (en)
Japanese (ja)
Other versions
JPS55468B2 (enExample
Inventor
Hiroshi Takahashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eikoo Enjiniaringu Kk
Original Assignee
Eikoo Enjiniaringu Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eikoo Enjiniaringu Kk filed Critical Eikoo Enjiniaringu Kk
Priority to JP2505376A priority Critical patent/JPS52108381A/ja
Publication of JPS52108381A publication Critical patent/JPS52108381A/ja
Publication of JPS55468B2 publication Critical patent/JPS55468B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP2505376A 1976-03-10 1976-03-10 Ionnspattering apparatus Granted JPS52108381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2505376A JPS52108381A (en) 1976-03-10 1976-03-10 Ionnspattering apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2505376A JPS52108381A (en) 1976-03-10 1976-03-10 Ionnspattering apparatus

Publications (2)

Publication Number Publication Date
JPS52108381A true JPS52108381A (en) 1977-09-10
JPS55468B2 JPS55468B2 (enExample) 1980-01-08

Family

ID=12155166

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2505376A Granted JPS52108381A (en) 1976-03-10 1976-03-10 Ionnspattering apparatus

Country Status (1)

Country Link
JP (1) JPS52108381A (enExample)

Also Published As

Publication number Publication date
JPS55468B2 (enExample) 1980-01-08

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