JPS52108131U - - Google Patents
Info
- Publication number
- JPS52108131U JPS52108131U JP1530476U JP1530476U JPS52108131U JP S52108131 U JPS52108131 U JP S52108131U JP 1530476 U JP1530476 U JP 1530476U JP 1530476 U JP1530476 U JP 1530476U JP S52108131 U JPS52108131 U JP S52108131U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Credit Cards Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1530476U JPS52108131U (en) | 1976-02-12 | 1976-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1530476U JPS52108131U (en) | 1976-02-12 | 1976-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52108131U true JPS52108131U (en) | 1977-08-17 |
Family
ID=28475543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1530476U Pending JPS52108131U (en) | 1976-02-12 | 1976-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52108131U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH079971U (en) * | 1993-07-05 | 1995-02-10 | 日電アネルバ株式会社 | Bias sputtering equipment |
-
1976
- 1976-02-12 JP JP1530476U patent/JPS52108131U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH079971U (en) * | 1993-07-05 | 1995-02-10 | 日電アネルバ株式会社 | Bias sputtering equipment |