JPS52107547U - - Google Patents

Info

Publication number
JPS52107547U
JPS52107547U JP1562776U JP1562776U JPS52107547U JP S52107547 U JPS52107547 U JP S52107547U JP 1562776 U JP1562776 U JP 1562776U JP 1562776 U JP1562776 U JP 1562776U JP S52107547 U JPS52107547 U JP S52107547U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1562776U
Other languages
Japanese (ja)
Other versions
JPS5619467Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976015627U priority Critical patent/JPS5619467Y2/ja
Publication of JPS52107547U publication Critical patent/JPS52107547U/ja
Application granted granted Critical
Publication of JPS5619467Y2 publication Critical patent/JPS5619467Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP1976015627U 1976-02-12 1976-02-12 Expired JPS5619467Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976015627U JPS5619467Y2 (fr) 1976-02-12 1976-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976015627U JPS5619467Y2 (fr) 1976-02-12 1976-02-12

Publications (2)

Publication Number Publication Date
JPS52107547U true JPS52107547U (fr) 1977-08-16
JPS5619467Y2 JPS5619467Y2 (fr) 1981-05-08

Family

ID=28475845

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976015627U Expired JPS5619467Y2 (fr) 1976-02-12 1976-02-12

Country Status (1)

Country Link
JP (1) JPS5619467Y2 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444655U (fr) * 1977-09-02 1979-03-27
JP2010530686A (ja) * 2007-06-20 2010-09-09 エプコス アクチエンゲゼルシャフト Mems部品及び製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057360A (fr) * 1973-09-18 1975-05-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057360A (fr) * 1973-09-18 1975-05-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444655U (fr) * 1977-09-02 1979-03-27
JP2010530686A (ja) * 2007-06-20 2010-09-09 エプコス アクチエンゲゼルシャフト Mems部品及び製造方法

Also Published As

Publication number Publication date
JPS5619467Y2 (fr) 1981-05-08

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