JPS52107547U - - Google Patents
Info
- Publication number
- JPS52107547U JPS52107547U JP1562776U JP1562776U JPS52107547U JP S52107547 U JPS52107547 U JP S52107547U JP 1562776 U JP1562776 U JP 1562776U JP 1562776 U JP1562776 U JP 1562776U JP S52107547 U JPS52107547 U JP S52107547U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976015627U JPS5619467Y2 (de) | 1976-02-12 | 1976-02-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1976015627U JPS5619467Y2 (de) | 1976-02-12 | 1976-02-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52107547U true JPS52107547U (de) | 1977-08-16 |
JPS5619467Y2 JPS5619467Y2 (de) | 1981-05-08 |
Family
ID=28475845
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1976015627U Expired JPS5619467Y2 (de) | 1976-02-12 | 1976-02-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5619467Y2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5444655U (de) * | 1977-09-02 | 1979-03-27 | ||
JP2010530686A (ja) * | 2007-06-20 | 2010-09-09 | エプコス アクチエンゲゼルシャフト | Mems部品及び製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5057360A (de) * | 1973-09-18 | 1975-05-19 |
-
1976
- 1976-02-12 JP JP1976015627U patent/JPS5619467Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5057360A (de) * | 1973-09-18 | 1975-05-19 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5444655U (de) * | 1977-09-02 | 1979-03-27 | ||
JP2010530686A (ja) * | 2007-06-20 | 2010-09-09 | エプコス アクチエンゲゼルシャフト | Mems部品及び製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5619467Y2 (de) | 1981-05-08 |