JPS5210397B2 - - Google Patents
Info
- Publication number
- JPS5210397B2 JPS5210397B2 JP47027378A JP2737872A JPS5210397B2 JP S5210397 B2 JPS5210397 B2 JP S5210397B2 JP 47027378 A JP47027378 A JP 47027378A JP 2737872 A JP2737872 A JP 2737872A JP S5210397 B2 JPS5210397 B2 JP S5210397B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47027378A JPS5210397B2 (en:Method) | 1972-03-21 | 1972-03-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47027378A JPS5210397B2 (en:Method) | 1972-03-21 | 1972-03-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4895879A JPS4895879A (en:Method) | 1973-12-08 |
| JPS5210397B2 true JPS5210397B2 (en:Method) | 1977-03-23 |
Family
ID=12219368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47027378A Expired JPS5210397B2 (en:Method) | 1972-03-21 | 1972-03-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5210397B2 (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6171342A (ja) * | 1984-09-14 | 1986-04-12 | Ryoichi Urao | 結晶性物質ウエハ表面の評価方法 |
-
1972
- 1972-03-21 JP JP47027378A patent/JPS5210397B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4895879A (en:Method) | 1973-12-08 |