JPS52100755U - - Google Patents

Info

Publication number
JPS52100755U
JPS52100755U JP886476U JP886476U JPS52100755U JP S52100755 U JPS52100755 U JP S52100755U JP 886476 U JP886476 U JP 886476U JP 886476 U JP886476 U JP 886476U JP S52100755 U JPS52100755 U JP S52100755U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP886476U
Other languages
Japanese (ja)
Other versions
JPS5536801Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP886476U priority Critical patent/JPS5536801Y2/ja
Publication of JPS52100755U publication Critical patent/JPS52100755U/ja
Application granted granted Critical
Publication of JPS5536801Y2 publication Critical patent/JPS5536801Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP886476U 1976-01-28 1976-01-28 Expired JPS5536801Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP886476U JPS5536801Y2 (enExample) 1976-01-28 1976-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP886476U JPS5536801Y2 (enExample) 1976-01-28 1976-01-28

Publications (2)

Publication Number Publication Date
JPS52100755U true JPS52100755U (enExample) 1977-07-30
JPS5536801Y2 JPS5536801Y2 (enExample) 1980-08-29

Family

ID=28469314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP886476U Expired JPS5536801Y2 (enExample) 1976-01-28 1976-01-28

Country Status (1)

Country Link
JP (1) JPS5536801Y2 (enExample)

Also Published As

Publication number Publication date
JPS5536801Y2 (enExample) 1980-08-29

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