JPS52100473U - - Google Patents
Info
- Publication number
- JPS52100473U JPS52100473U JP857976U JP857976U JPS52100473U JP S52100473 U JPS52100473 U JP S52100473U JP 857976 U JP857976 U JP 857976U JP 857976 U JP857976 U JP 857976U JP S52100473 U JPS52100473 U JP S52100473U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP857976U JPS52100473U (pm) | 1976-01-28 | 1976-01-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP857976U JPS52100473U (pm) | 1976-01-28 | 1976-01-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS52100473U true JPS52100473U (pm) | 1977-07-29 |
Family
ID=28469038
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP857976U Pending JPS52100473U (pm) | 1976-01-28 | 1976-01-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52100473U (pm) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7163588B2 (en) | 1997-05-09 | 2007-01-16 | Semitool, Inc. | Processing a workpiece using water, a base, and ozone |
| US7416611B2 (en) | 1997-05-09 | 2008-08-26 | Semitool, Inc. | Process and apparatus for treating a workpiece with gases |
-
1976
- 1976-01-28 JP JP857976U patent/JPS52100473U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7163588B2 (en) | 1997-05-09 | 2007-01-16 | Semitool, Inc. | Processing a workpiece using water, a base, and ozone |
| US7416611B2 (en) | 1997-05-09 | 2008-08-26 | Semitool, Inc. | Process and apparatus for treating a workpiece with gases |