JPS52100043A - Grooving exposure method for spherical dynamic pressure bearing - Google Patents
Grooving exposure method for spherical dynamic pressure bearingInfo
- Publication number
- JPS52100043A JPS52100043A JP1738676A JP1738676A JPS52100043A JP S52100043 A JPS52100043 A JP S52100043A JP 1738676 A JP1738676 A JP 1738676A JP 1738676 A JP1738676 A JP 1738676A JP S52100043 A JPS52100043 A JP S52100043A
- Authority
- JP
- Japan
- Prior art keywords
- dynamic pressure
- pressure bearing
- grooving
- exposure method
- spherical dynamic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Projection-Type Copiers In General (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Sliding-Contact Bearings (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51017386A JPS6041346B2 (ja) | 1976-02-18 | 1976-02-18 | 球面動圧軸受の溝加工用露光方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51017386A JPS6041346B2 (ja) | 1976-02-18 | 1976-02-18 | 球面動圧軸受の溝加工用露光方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52100043A true JPS52100043A (en) | 1977-08-22 |
JPS6041346B2 JPS6041346B2 (ja) | 1985-09-17 |
Family
ID=11942552
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51017386A Expired JPS6041346B2 (ja) | 1976-02-18 | 1976-02-18 | 球面動圧軸受の溝加工用露光方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6041346B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07147218A (ja) * | 1992-11-12 | 1995-06-06 | Internatl Business Mach Corp <Ibm> | 3次元結像システムおよび方法 |
-
1976
- 1976-02-18 JP JP51017386A patent/JPS6041346B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07147218A (ja) * | 1992-11-12 | 1995-06-06 | Internatl Business Mach Corp <Ibm> | 3次元結像システムおよび方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6041346B2 (ja) | 1985-09-17 |
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