JPS5197548U - - Google Patents

Info

Publication number
JPS5197548U
JPS5197548U JP1466375U JP1466375U JPS5197548U JP S5197548 U JPS5197548 U JP S5197548U JP 1466375 U JP1466375 U JP 1466375U JP 1466375 U JP1466375 U JP 1466375U JP S5197548 U JPS5197548 U JP S5197548U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1466375U
Other languages
Japanese (ja)
Other versions
JPS561723Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1975014663U priority Critical patent/JPS561723Y2/ja
Publication of JPS5197548U publication Critical patent/JPS5197548U/ja
Application granted granted Critical
Publication of JPS561723Y2 publication Critical patent/JPS561723Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1975014663U 1975-02-03 1975-02-03 Expired JPS561723Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975014663U JPS561723Y2 (cg-RX-API-DMAC7.html) 1975-02-03 1975-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975014663U JPS561723Y2 (cg-RX-API-DMAC7.html) 1975-02-03 1975-02-03

Publications (2)

Publication Number Publication Date
JPS5197548U true JPS5197548U (cg-RX-API-DMAC7.html) 1976-08-05
JPS561723Y2 JPS561723Y2 (cg-RX-API-DMAC7.html) 1981-01-16

Family

ID=28093784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975014663U Expired JPS561723Y2 (cg-RX-API-DMAC7.html) 1975-02-03 1975-02-03

Country Status (1)

Country Link
JP (1) JPS561723Y2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5288277A (en) * 1976-01-19 1977-07-23 Comtec Kk Spatter coating apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926184A (cg-RX-API-DMAC7.html) * 1971-09-07 1974-03-08
JPS4962384A (cg-RX-API-DMAC7.html) * 1972-10-18 1974-06-17
JPS5023382A (cg-RX-API-DMAC7.html) * 1973-07-05 1975-03-13

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4926184A (cg-RX-API-DMAC7.html) * 1971-09-07 1974-03-08
JPS4962384A (cg-RX-API-DMAC7.html) * 1972-10-18 1974-06-17
JPS5023382A (cg-RX-API-DMAC7.html) * 1973-07-05 1975-03-13

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5288277A (en) * 1976-01-19 1977-07-23 Comtec Kk Spatter coating apparatus

Also Published As

Publication number Publication date
JPS561723Y2 (cg-RX-API-DMAC7.html) 1981-01-16

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